Cavity-BOX SOI: Advanced Silicon Substrate with Pre-Patterned BOX for Monolithic MEMS Fabrication

Several Silicon on Insulator (SOI) wafer manufacturers are now offering products with customer-defined cavities etched in the handle wafer, which significantly simplifies the fabrication of MEMS devices such as pressure sensors. This paper presents a novel cavity buried oxide (BOX) SOI substrate (ca...

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Detalles Bibliográficos
Autores principales: Kluba, Marta Maria, Li, Jian, Parkkinen, Katja, Louwerse, Marcus, Snijder, Jaap, Dekker, Ronald
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8070108/
https://www.ncbi.nlm.nih.gov/pubmed/33918068
http://dx.doi.org/10.3390/mi12040414

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8070108/
https://www.ncbi.nlm.nih.gov/pubmed/33918068
http://dx.doi.org/10.3390/mi12040414

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