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Structure and Properties of Zr-Mo-Si-B-(N) Hard Coatings Obtained by d.c. Magnetron Sputtering of ZrB(2)-MoSi(2) Target

Coatings in a Zr-Mo-Si-B-N system were deposited by the magnetron sputtering of ZrB(2)-MoSi(2) targets in argon and nitrogen. The structure of the coatings was investigated using scanning electron microscopy, X-ray diffraction, energy-dispersive spectroscopy, and glow-discharge optical emission spec...

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Detalles Bibliográficos
Autores principales: Kiryukhantsev-Korneev, Philipp, Sytchenko, Alina, Pogozhev, Yuriy, Vorotilo, Stepan, Orekhov, Anton, Loginov, Pavel, Levashov, Evgeny
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8070280/
https://www.ncbi.nlm.nih.gov/pubmed/33924418
http://dx.doi.org/10.3390/ma14081932