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Structure and Properties of Zr-Mo-Si-B-(N) Hard Coatings Obtained by d.c. Magnetron Sputtering of ZrB(2)-MoSi(2) Target
Coatings in a Zr-Mo-Si-B-N system were deposited by the magnetron sputtering of ZrB(2)-MoSi(2) targets in argon and nitrogen. The structure of the coatings was investigated using scanning electron microscopy, X-ray diffraction, energy-dispersive spectroscopy, and glow-discharge optical emission spec...
Autores principales: | , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2021
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8070280/ https://www.ncbi.nlm.nih.gov/pubmed/33924418 http://dx.doi.org/10.3390/ma14081932 |