Photothermal Optical Beam Steering Using Large Deformation Multi-Layer Thin Film Structures

Photothermal actuation of microstructures remains an active area of research for microsystems that demand electrically isolated, remote, on-chip manipulation. In this study, large-deformation structures constructed from thin films traditional to microsystems were explored through both simulation and...

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Detalles Bibliográficos
Autores principales: Hall, Harris J., McDaniel, Sean, Shah, Piyush, Torres, David, Figueroa, Jose, Starman, LaVern
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8070700/
https://www.ncbi.nlm.nih.gov/pubmed/33919730
http://dx.doi.org/10.3390/mi12040428

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8070700/
https://www.ncbi.nlm.nih.gov/pubmed/33919730
http://dx.doi.org/10.3390/mi12040428

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