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Photothermal Optical Beam Steering Using Large Deformation Multi-Layer Thin Film Structures
Photothermal actuation of microstructures remains an active area of research for microsystems that demand electrically isolated, remote, on-chip manipulation. In this study, large-deformation structures constructed from thin films traditional to microsystems were explored through both simulation and...
| Autores principales: | , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2021
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8070700/ https://www.ncbi.nlm.nih.gov/pubmed/33919730 http://dx.doi.org/10.3390/mi12040428 |