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ALD Deposited ZnO:Al Films on Mica for Flexible PDLC Devices

In this work, highly conductive Al-doped ZnO (AZO) films are deposited on transparent and flexible muscovite mica substrates by using the atomic layer deposition (ALD) technique. AZO-mica structures possess high optical transmittance at visible and near-infrared spectral range and retain low electri...

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Detalles Bibliográficos
Autores principales: Dimitrov, Dimitre Z., Chen, Zih Fan, Marinova, Vera, Petrova, Dimitrina, Ho, Chih Yao, Napoleonov, Blagovest, Blagoev, Blagoy, Strijkova, Velichka, Hsu, Ken Yuh, Lin, Shiuan Huei, Juang, Jenh-Yih
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8071305/
https://www.ncbi.nlm.nih.gov/pubmed/33920931
http://dx.doi.org/10.3390/nano11041011