Magnesium Zirconate Titanate Thin Films Used as an NO(2) Sensing Layer for Gas Sensor Applications Developed Using a Sol–Gel Method

Magnesium zirconate titanate (MZT) thin films, used as a sensing layer on Al interdigitated electrodes prepared using a sol–gel spin-coating method, are demonstrated in this study. The p-type MZT/Al/SiO(2)/Si structure for sensing NO(2) is also discussed. The results indicated that the best sensitiv...

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Detalles Bibliográficos
Autores principales: Huang, Pei-Shan, Lee, Ke-Jing, Wang, Yeong-Her
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Communication
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8073342/
https://www.ncbi.nlm.nih.gov/pubmed/33923840
http://dx.doi.org/10.3390/s21082825

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8073342/
https://www.ncbi.nlm.nih.gov/pubmed/33923840
http://dx.doi.org/10.3390/s21082825

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