Control of Spring Softening and Hardening in the Squared Daisy

Nonlinear, mechanical microelectromechanical system (MEMS) resonating structures exhibit large displacement and a relatively broad operating bandwidth. These unique features make them particularly of interest for the development of MEMS actuators and sensors. In this work, a mechanical MEMS structur...

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Detalles Bibliográficos
Autores principales: Gratuze, Mathieu, Alameh, Abdul-Hafiz, Nabavi, Seyedfakhreddin, Nabki, Frederic
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8073695/
https://www.ncbi.nlm.nih.gov/pubmed/33923665
http://dx.doi.org/10.3390/mi12040448

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8073695/
https://www.ncbi.nlm.nih.gov/pubmed/33923665
http://dx.doi.org/10.3390/mi12040448

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