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Control of Spring Softening and Hardening in the Squared Daisy
Nonlinear, mechanical microelectromechanical system (MEMS) resonating structures exhibit large displacement and a relatively broad operating bandwidth. These unique features make them particularly of interest for the development of MEMS actuators and sensors. In this work, a mechanical MEMS structur...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2021
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8073695/ https://www.ncbi.nlm.nih.gov/pubmed/33923665 http://dx.doi.org/10.3390/mi12040448 |