Switchable Transducers in GaN MEMS Resonators: Performance Comparison and Analysis

This work presents a comprehensive comparison of switchable electromechanical transducers in an AlN/GaN heterostructure toward the goal of reconfigurable RF building blocks in next-generation ad hoc radios. The transducers’ inherent switching was achieved by depleting a 2D electron gas (2DEG) channe...

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Detalles Bibliográficos
Autores principales: Ahmed, Imtiaz, Weinstein, Dana
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8073700/
https://www.ncbi.nlm.nih.gov/pubmed/33921893
http://dx.doi.org/10.3390/mi12040461

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8073700/
https://www.ncbi.nlm.nih.gov/pubmed/33921893
http://dx.doi.org/10.3390/mi12040461

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