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Evaporation of Ti/Cr/Ti Multilayer on Flexible Polyimide and Its Application for Strain Sensor
A flexible Ti/Cr/Ti multilayer strain gauge have been successfully developed based on polyimide substrate. The pure Ti metal strain gauge have shown the hysteresis phenomenon at the relationship between resistance and strain during tensile test. The experimental results of multilayer strain gauge sh...
Autores principales: | , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2021
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8073819/ https://www.ncbi.nlm.nih.gov/pubmed/33921553 http://dx.doi.org/10.3390/mi12040456 |