Influence of ultrasonic combined supercritical-CO(2) electrodeposition process on copper film fabrication: Electrochemical evaluation

Introducing ultrasound irradiation to the electrodeposition process can significantly improve the physical and chemical properties of deposited films. Meanwhile, the beneficial effects from supercritical-CO(2,) such as high diffusivity, high permeability, low surface tension, etc., would improve the...

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Detalles Bibliográficos
Autores principales: Pandiyarajan, Sabarison, Hsiao, Po-Ju, Liao, Ai-Ho, Ganesan, Muthusankar, Manickaraj, Shobana Sebstin Mary, Lee, Chen-Ta, Huang, Sheng-Tung, Chuang, Ho-Chiao
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Elsevier 2021
Materias:
Original Research Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8091059/
https://www.ncbi.nlm.nih.gov/pubmed/33892261
http://dx.doi.org/10.1016/j.ultsonch.2021.105555

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8091059/
https://www.ncbi.nlm.nih.gov/pubmed/33892261
http://dx.doi.org/10.1016/j.ultsonch.2021.105555

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