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Impact of sandwiched strain periodic multilayer AlN/GaN on strain and crystalline quality of a-plane GaN
We demonstrated high-quality single crystalline a-plane undoped-gallium nitride grown on a nonpatterned r-plane sapphire substrate via metal–organic chemical vapor deposition. The effect of four different numbers of sandwiched strain-periodic AlN/GaN multilayers on the strain state, crystal quality,...
Autores principales: | , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Nature Publishing Group UK
2021
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8102578/ https://www.ncbi.nlm.nih.gov/pubmed/33958689 http://dx.doi.org/10.1038/s41598-021-89201-8 |