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Structural Characterization of Al(0.37)In(0.63)N/AlN/p-Si (111) Heterojunctions Grown by RF Sputtering for Solar Cell Applications
Compact Al(0.37)In(0.63)N layers were grown by radiofrequency sputtering on bare and 15 nm-thick AlN-buffered Si (111) substrates. The crystalline quality of the AlInN layers was studied by high-resolution X-ray diffraction measurements and transmission electron microscopy. Both techniques show an i...
Autores principales: | , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2021
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8123643/ https://www.ncbi.nlm.nih.gov/pubmed/33925320 http://dx.doi.org/10.3390/ma14092236 |