Single-Crystal Diamond Needle Fabrication Using Hot-Filament Chemical Vapor Deposition

Single-crystal diamonds in the form of micrometer-scale pyramids were produced using a combination of hot-filament (HF) chemical vapor deposition (CVD) and thermal oxidation processes. The diamond pyramids were compared here with similar ones that were manufactured using plasma-enhanced (PE) CVD. Th...

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Detalles Bibliográficos
Autores principales: Ismagilov, Rinat, Malykhin, Sergei, Puzyr, Aleksey, Loginov, Artem, Kleshch, Victor, Obraztsov, Alexander
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8124821/
https://www.ncbi.nlm.nih.gov/pubmed/33947061
http://dx.doi.org/10.3390/ma14092320

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8124821/
https://www.ncbi.nlm.nih.gov/pubmed/33947061
http://dx.doi.org/10.3390/ma14092320

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