Raman Scattering Study on the Influence of E-Beam Bombardment on Si Electron Lens

Microcolumns have a stacked structure composed of an electron emitter, electron lens (source lens), einzel lens, and a deflector manufactured using a micro electro-mechanical system process. The electrons emitted from the tungsten field emitter mostly pass through the aperture holes. However, other...

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Detalles Bibliográficos
Autores principales: Lee, Geon-Woo, Lee, Young-Bok, Baek, Dong-Hyun, Kim, Jung-Gon, Kim, Ho-Seob
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8125799/
https://www.ncbi.nlm.nih.gov/pubmed/34066676
http://dx.doi.org/10.3390/molecules26092766

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8125799/
https://www.ncbi.nlm.nih.gov/pubmed/34066676
http://dx.doi.org/10.3390/molecules26092766

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