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Raman Scattering Study on the Influence of E-Beam Bombardment on Si Electron Lens
Microcolumns have a stacked structure composed of an electron emitter, electron lens (source lens), einzel lens, and a deflector manufactured using a micro electro-mechanical system process. The electrons emitted from the tungsten field emitter mostly pass through the aperture holes. However, other...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2021
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8125799/ https://www.ncbi.nlm.nih.gov/pubmed/34066676 http://dx.doi.org/10.3390/molecules26092766 |