Study on machining characteristics of magnetically controlled laser induced plasma micro-machining single-crystal silicon

INTRODUCTION: Laser induced plasma micro-machining (LIPMM) has proved its superiority in micro-machining of hard and brittle materials due to less thermal defects, smaller heat affected zone and larger aspect ratio compared to conventional laser ablation. OBJECTIVES: In order to improve characterist...

Descripción completa

Detalles Bibliográficos
Autores principales: Zhang, Yanming, Zhang, Zhen, Zhang, Yi, Liu, Denghua, Wu, Jie, Huang, Yu, Zhang, Guojun
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Elsevier 2020
Materias:
Mathematics, Engineering, and Computer Science
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8132205/
https://www.ncbi.nlm.nih.gov/pubmed/34026285
http://dx.doi.org/10.1016/j.jare.2020.12.005

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8132205/
https://www.ncbi.nlm.nih.gov/pubmed/34026285
http://dx.doi.org/10.1016/j.jare.2020.12.005

Ejemplares similares