Fabrication of Functional Microdevices in SU-8 by Multi-Photon Lithography

This review surveys advances in the fabrication of functional microdevices by multi-photon lithography (MPL) using the SU-8 material system. Microdevices created by MPL in SU-8 have been key to progress in the fields of micro-fluidics, micro-electromechanical systems (MEMS), micro-robotics, and phot...

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Detalles Bibliográficos
Autores principales: Golvari, Pooria, Kuebler, Stephen M.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Review
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8143355/
https://www.ncbi.nlm.nih.gov/pubmed/33919437
http://dx.doi.org/10.3390/mi12050472

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8143355/
https://www.ncbi.nlm.nih.gov/pubmed/33919437
http://dx.doi.org/10.3390/mi12050472

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