Cargando…

Fabrication of Functional Microdevices in SU-8 by Multi-Photon Lithography

This review surveys advances in the fabrication of functional microdevices by multi-photon lithography (MPL) using the SU-8 material system. Microdevices created by MPL in SU-8 have been key to progress in the fields of micro-fluidics, micro-electromechanical systems (MEMS), micro-robotics, and phot...

Descripción completa

Detalles Bibliográficos
Autores principales:	Golvari, Pooria, Kuebler, Stephen M.
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2021
Materias:	Review
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8143355/ https://www.ncbi.nlm.nih.gov/pubmed/33919437 http://dx.doi.org/10.3390/mi12050472

Ejemplares similares

Single-photon-multi-layer-interference lithography for high-aspect-ratio and three-dimensional SU-8 micro-/nanostructures
por: Ghosh, Siddharth, et al.
Publicado: (2016)

Comprehensive Simulations for Ultraviolet Lithography Process of Thick SU-8 Photoresist
por: Zhou, Zai-Fa, et al.
Publicado: (2018)

Nanoimprint lithography for nanodevice fabrication
por: Barcelo, Steven, et al.
Publicado: (2016)

Single-Mode Tapered Vertical SU-8 Waveguide Fabricated by E-Beam Lithography for Analyte Sensing
por: Xin, Yu, et al.
Publicado: (2019)

Rapid, inexpensive fabrication of electrophoretic microdevices for fluorescence detection
por: Nelson, Daniel A., et al.
Publicado: (2022)

Proceedings of the Winter School on The Physics and Fabrication of Microstructures and Microdevices
por: Kelly, Michael, et al.
Publicado: (1986)

Tensile properties of polymer nanowires fabricated via two-photon lithography
por: Ladner, Ian S., et al.
Publicado: (2019)

Microacoustic Metagratings at Ultra‐High Frequencies Fabricated by Two‐Photon Lithography
por: Melnikov, Anton, et al.
Publicado: (2022)

Fabrication of Silicon Nanobelts and Nanopillars by Soft Lithography for Hydrophobic and Hydrophilic Photonic Surfaces
por: Baquedano, Estela, et al.
Publicado: (2017)

Fabrication of a Gelatin-Based Microdevice for Vascular Cell Culture
por: Sasaki, Satoko, et al.
Publicado: (2022)

Nanoscale multi-beam lithography of photonic crystals with ultrafast laser
por: Li, Jiaqun, et al.
Publicado: (2023)

In-chip microstructures and photonic devices fabricated by nonlinear laser lithography deep inside silicon
por: Tokel, Onur, et al.
Publicado: (2017)

Two-Photon Nanolithography of Tailored Hollow three-dimensional Microdevices for Biosystems
por: Liao, Caizhi, et al.
Publicado: (2019)

Infrared neural stimulation and inhibition using an implantable silicon photonic microdevice
por: Horváth, Ágoston Csaba, et al.
Publicado: (2020)

Recent Microdevice-Based Aptamer Sensors
por: Mazaafrianto, Donny Nugraha, et al.
Publicado: (2018)

Plasmonic nanostructures fabricated using nanosphere-lithography, soft-lithography and plasma etching
por: Gonçalves, Manuel R, et al.
Publicado: (2011)

Microdevice-based mechanical compression on living cells
por: Onal, Sevgi, et al.
Publicado: (2022)

Injectable wireless microdevices: challenges and opportunities
por: Khalifa, Adam, et al.
Publicado: (2021)

A 2D Waveguide Method for Lithography Simulation of Thick SU-8 Photoresist
por: Geng, Zi-Chen, et al.
Publicado: (2020)

Streptavidin functionalized polymer nanodots fabricated by visible light lithography
por: Wolfesberger, Clemens, et al.
Publicado: (2015)

λ/30 inorganic features achieved by multi-photon 3D lithography
por: Jin, Feng, et al.
Publicado: (2022)

Bacteria-Based Microdevices for the Oral Delivery of Macromolecules
por: Cao, Zhenping, et al.
Publicado: (2021)

Bio-Inspired Microdevices that Mimic the Human Vasculature
por: Islam, Md. Mydul, et al.
Publicado: (2017)

Review of Microdevices for Hemozoin-Based Malaria Detection
por: Baptista, Vitória, et al.
Publicado: (2022)

Microacoustic Metagratings at Ultra‐High Frequencies Fabricated by Two‐Photon Lithography (Adv. Sci. 20/2022)
por: Melnikov, Anton, et al.
Publicado: (2022)

Laser Interference Lithography—A Method for the Fabrication of Controlled Periodic Structures
por: Liu, Ri, et al.
Publicado: (2023)

Thermal Nanoimprint Lithography—A Review of the Process, Mold Fabrication, and Material
por: Unno, Noriyuki, et al.
Publicado: (2023)

Nanopillar Diffraction Gratings by Two-Photon Lithography
por: Purtov, Julia, et al.
Publicado: (2019)

The Fabrication of Nanostructures on Polydimethylsiloxane by Laser Interference Lithography
por: Wu, Jun, et al.
Publicado: (2019)

Studying root–environment interactions in structured microdevices
por: Kaiser, Christian-Frederic, et al.
Publicado: (2023)

A Review on Microdevices for Isolating Circulating Tumor Cells
por: Lei, Kin Fong
Publicado: (2020)

Hydroxypropyl cellulose photonic architectures by soft nanoimprinting lithography
por: Espinha, André, et al.
Publicado: (2018)

Anisotropic silicon nanowire arrays fabricated by colloidal lithography
por: Rey, Marcel, et al.
Publicado: (2021)

Microdevices for examining immunological responses of single cells to HIV
por: Choi, Jonghoon, et al.
Publicado: (2014)

Colloidal lithography for fabricating patterned polymer-brush microstructures
por: Chen, Tao, et al.
Publicado: (2012)

Fabrication of carbon nanomembranes by helium ion beam lithography
por: Zhang, Xianghui, et al.
Publicado: (2014)

Multifunctional Nanostructures and Nanopocket Particles Fabricated by Nanoimprint Lithography
por: Schrittwieser, Stefan, et al.
Publicado: (2019)

Nanoporous membrane fabrication by nanoimprint lithography for nanoparticle sieving
por: Sabirova, Ainur, et al.
Publicado: (2022)

Experimental Validation of Diffraction Lithography for Fabrication of Solid Microneedles
por: Tan, Jun Ying, et al.
Publicado: (2022)

Bioorthogonal Uncaging of the Active Metabolite of Irinotecan by Palladium‐Functionalized Microdevices
por: Adam, Catherine, et al.
Publicado: (2018)

Cannot write session to /tmp/vufind_sessions/sess_24enes9vv8k180hg3i6f15f4dp