Analog Spatial Light Modulators Based on Micromirror Arrays

The Fraunhofer Institute for Photonic Microsystems (IPMS) has been developing and manufacturing micromirror arrays for more than 20 years. While originally focusing on applications related to microlithography and therefore mainly for light in the deep ultraviolet range, the range of applications has...

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Detalles Bibliográficos
Autores principales: Dauderstädt, Ulrike, Dürr, Peter, Gehner, Andreas, Wagner, Michael, Schenk, Harald
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8145509/
https://www.ncbi.nlm.nih.gov/pubmed/33922590
http://dx.doi.org/10.3390/mi12050483

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8145509/
https://www.ncbi.nlm.nih.gov/pubmed/33922590
http://dx.doi.org/10.3390/mi12050483

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