Analog Spatial Light Modulators Based on Micromirror Arrays

The Fraunhofer Institute for Photonic Microsystems (IPMS) has been developing and manufacturing micromirror arrays for more than 20 years. While originally focusing on applications related to microlithography and therefore mainly for light in the deep ultraviolet range, the range of applications has...

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Autores principales: Dauderstädt, Ulrike, Dürr, Peter, Gehner, Andreas, Wagner, Michael, Schenk, Harald
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8145509/
https://www.ncbi.nlm.nih.gov/pubmed/33922590
http://dx.doi.org/10.3390/mi12050483
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author Dauderstädt, Ulrike
Dürr, Peter
Gehner, Andreas
Wagner, Michael
Schenk, Harald
author_facet Dauderstädt, Ulrike
Dürr, Peter
Gehner, Andreas
Wagner, Michael
Schenk, Harald
author_sort Dauderstädt, Ulrike
collection PubMed
description The Fraunhofer Institute for Photonic Microsystems (IPMS) has been developing and manufacturing micromirror arrays for more than 20 years. While originally focusing on applications related to microlithography and therefore mainly for light in the deep ultraviolet range, the range of applications has been expanded since, including applications in the visible and near-infrared range. This paper gives an overview of the devices and their designs, fabrication, and characterization.
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spelling pubmed-81455092021-05-26 Analog Spatial Light Modulators Based on Micromirror Arrays Dauderstädt, Ulrike Dürr, Peter Gehner, Andreas Wagner, Michael Schenk, Harald Micromachines (Basel) Article The Fraunhofer Institute for Photonic Microsystems (IPMS) has been developing and manufacturing micromirror arrays for more than 20 years. While originally focusing on applications related to microlithography and therefore mainly for light in the deep ultraviolet range, the range of applications has been expanded since, including applications in the visible and near-infrared range. This paper gives an overview of the devices and their designs, fabrication, and characterization. MDPI 2021-04-23 /pmc/articles/PMC8145509/ /pubmed/33922590 http://dx.doi.org/10.3390/mi12050483 Text en © 2021 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Dauderstädt, Ulrike
Dürr, Peter
Gehner, Andreas
Wagner, Michael
Schenk, Harald
Analog Spatial Light Modulators Based on Micromirror Arrays
title Analog Spatial Light Modulators Based on Micromirror Arrays
title_full Analog Spatial Light Modulators Based on Micromirror Arrays
title_fullStr Analog Spatial Light Modulators Based on Micromirror Arrays
title_full_unstemmed Analog Spatial Light Modulators Based on Micromirror Arrays
title_short Analog Spatial Light Modulators Based on Micromirror Arrays
title_sort analog spatial light modulators based on micromirror arrays
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8145509/
https://www.ncbi.nlm.nih.gov/pubmed/33922590
http://dx.doi.org/10.3390/mi12050483
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