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Wet-Etched Microlens Array for 200 nm Spatial Isolation of Epitaxial Single QDs and 80 nm Broadband Enhancement of Their Quantum Light Extraction
Uniform arrays of three shapes ([Formula: see text] , [Formula: see text] , and [Formula: see text]) of GaAs microlenses (MLs) by wet-etching are demonstrated, ∼200 nm spatial isolation of epitaxial single QDs embedded ([Formula: see text]: 890–990 nm) and broadband ([Formula: see text] nm) enhancem...
| Autores principales: | , , , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2021
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8146877/ https://www.ncbi.nlm.nih.gov/pubmed/33925761 http://dx.doi.org/10.3390/nano11051136 |