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Wet-Etched Microlens Array for 200 nm Spatial Isolation of Epitaxial Single QDs and 80 nm Broadband Enhancement of Their Quantum Light Extraction

Uniform arrays of three shapes ([Formula: see text] , [Formula: see text] , and [Formula: see text]) of GaAs microlenses (MLs) by wet-etching are demonstrated, ∼200 nm spatial isolation of epitaxial single QDs embedded ([Formula: see text]: 890–990 nm) and broadband ([Formula: see text] nm) enhancem...

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Detalles Bibliográficos
Autores principales: Li, Shulun, Shang, Xiangjun, Chen, Yao, Su, Xiangbin, Hao, Huiming, Liu, Hanqing, Zhang, Yu, Ni, Haiqiao, Niu, Zhichuan
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8146877/
https://www.ncbi.nlm.nih.gov/pubmed/33925761
http://dx.doi.org/10.3390/nano11051136