Biaxial Angular Acceleration Sensor with Rotational-Symmetric Spiral Channels and MEMS Piezoresistive Cantilevers

Angular acceleration sensors are attracting attention as sensors for monitoring rotational vibration. Many angular acceleration sensors have been developed; however, multiaxis measurement is still in a challenging stage. In this study, we propose a biaxial angular acceleration sensor with two uniaxi...

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Detalles Bibliográficos
Autores principales: Nakashima, Rihachiro, Takahashi, Hidetoshi
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8147218/
https://www.ncbi.nlm.nih.gov/pubmed/33946579
http://dx.doi.org/10.3390/mi12050507

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8147218/
https://www.ncbi.nlm.nih.gov/pubmed/33946579
http://dx.doi.org/10.3390/mi12050507

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