Detectors Array for In Situ Electron Beam Imaging by 16-nm FinFET CMOS Technology

A novel in situ imaging solution and detectors array for the focused electron beam (e-beam) are the first time proposed and demonstrated. The proposed in-tool, on-wafer e-beam detectors array features full FinFET CMOS logic compatibility, compact 2 T pixel structure, fast response, high responsivity...

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Detalles Bibliográficos
Autores principales: Wang, Chien-Ping, Lin, Burn Jeng, Shih, Jiaw-Ren, Chih, Yue-Der, Chang, Jonathan, Lin, Chrong Jung, King, Ya-Chin
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer US 2021
Materias:
Nano Express
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8149521/
https://www.ncbi.nlm.nih.gov/pubmed/34032939
http://dx.doi.org/10.1186/s11671-021-03552-9

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8149521/
https://www.ncbi.nlm.nih.gov/pubmed/34032939
http://dx.doi.org/10.1186/s11671-021-03552-9

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