Detectors Array for In Situ Electron Beam Imaging by 16-nm FinFET CMOS Technology

A novel in situ imaging solution and detectors array for the focused electron beam (e-beam) are the first time proposed and demonstrated. The proposed in-tool, on-wafer e-beam detectors array features full FinFET CMOS logic compatibility, compact 2 T pixel structure, fast response, high responsivity...

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Autores principales: Wang, Chien-Ping, Lin, Burn Jeng, Shih, Jiaw-Ren, Chih, Yue-Der, Chang, Jonathan, Lin, Chrong Jung, King, Ya-Chin
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer US 2021
Materias:
Nano Express
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8149521/
https://www.ncbi.nlm.nih.gov/pubmed/34032939
http://dx.doi.org/10.1186/s11671-021-03552-9
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author Wang, Chien-Ping
Lin, Burn Jeng
Shih, Jiaw-Ren
Chih, Yue-Der
Chang, Jonathan
Lin, Chrong Jung
King, Ya-Chin
author_facet Wang, Chien-Ping
Lin, Burn Jeng
Shih, Jiaw-Ren
Chih, Yue-Der
Chang, Jonathan
Lin, Chrong Jung
King, Ya-Chin
author_sort Wang, Chien-Ping
collection PubMed
description A novel in situ imaging solution and detectors array for the focused electron beam (e-beam) are the first time proposed and demonstrated. The proposed in-tool, on-wafer e-beam detectors array features full FinFET CMOS logic compatibility, compact 2 T pixel structure, fast response, high responsivity, and wide dynamic range. The e-beam imaging pattern and detection results can be further stored in the sensing/storage node without external power supply, enabling off-line electrical reading, which can be used to rapidly provide timely feedback of the key parameters of the e-beam on the projected wafers, including dosage, accelerating energy, and intensity distributions.
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spelling pubmed-81495212021-06-09 Detectors Array for In Situ Electron Beam Imaging by 16-nm FinFET CMOS Technology Wang, Chien-Ping Lin, Burn Jeng Shih, Jiaw-Ren Chih, Yue-Der Chang, Jonathan Lin, Chrong Jung King, Ya-Chin Nanoscale Res Lett Nano Express A novel in situ imaging solution and detectors array for the focused electron beam (e-beam) are the first time proposed and demonstrated. The proposed in-tool, on-wafer e-beam detectors array features full FinFET CMOS logic compatibility, compact 2 T pixel structure, fast response, high responsivity, and wide dynamic range. The e-beam imaging pattern and detection results can be further stored in the sensing/storage node without external power supply, enabling off-line electrical reading, which can be used to rapidly provide timely feedback of the key parameters of the e-beam on the projected wafers, including dosage, accelerating energy, and intensity distributions. Springer US 2021-05-25 /pmc/articles/PMC8149521/ /pubmed/34032939 http://dx.doi.org/10.1186/s11671-021-03552-9 Text en © The Author(s) 2021 https://creativecommons.org/licenses/by/4.0/Open AccessThis article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons licence, and indicate if changes were made. The images or other third party material in this article are included in the article's Creative Commons licence, unless indicated otherwise in a credit line to the material. If material is not included in the article's Creative Commons licence and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this licence, visit http://creativecommons.org/licenses/by/4.0/ (https://creativecommons.org/licenses/by/4.0/) .
spellingShingle Nano Express
Wang, Chien-Ping
Lin, Burn Jeng
Shih, Jiaw-Ren
Chih, Yue-Der
Chang, Jonathan
Lin, Chrong Jung
King, Ya-Chin
Detectors Array for In Situ Electron Beam Imaging by 16-nm FinFET CMOS Technology
title Detectors Array for In Situ Electron Beam Imaging by 16-nm FinFET CMOS Technology
title_full Detectors Array for In Situ Electron Beam Imaging by 16-nm FinFET CMOS Technology
title_fullStr Detectors Array for In Situ Electron Beam Imaging by 16-nm FinFET CMOS Technology
title_full_unstemmed Detectors Array for In Situ Electron Beam Imaging by 16-nm FinFET CMOS Technology
title_short Detectors Array for In Situ Electron Beam Imaging by 16-nm FinFET CMOS Technology
title_sort detectors array for in situ electron beam imaging by 16-nm finfet cmos technology
topic Nano Express
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8149521/
https://www.ncbi.nlm.nih.gov/pubmed/34032939
http://dx.doi.org/10.1186/s11671-021-03552-9
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