Study for Laser Controlled Fabrication of Micro/Nano-Structures of Silicon Based on Multi-Physics Model

This work proposes a detailed process of micro/nano-structure surface modification in relation to temperature field. In this paper, a femtosecond laser is used to induce the surface morphology of a silicon substrate. We provide a new method for the fabrication of a micro/nano-cantilever probe by con...

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Detalles Bibliográficos
Autores principales: Wu, Liqun, Chen, Jianlong, Zhang, Linan, Wang, Hongcheng, Chen, Chao
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8151701/
https://www.ncbi.nlm.nih.gov/pubmed/34067006
http://dx.doi.org/10.3390/mi12050528

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8151701/
https://www.ncbi.nlm.nih.gov/pubmed/34067006
http://dx.doi.org/10.3390/mi12050528

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