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Study for Laser Controlled Fabrication of Micro/Nano-Structures of Silicon Based on Multi-Physics Model
This work proposes a detailed process of micro/nano-structure surface modification in relation to temperature field. In this paper, a femtosecond laser is used to induce the surface morphology of a silicon substrate. We provide a new method for the fabrication of a micro/nano-cantilever probe by con...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2021
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8151701/ https://www.ncbi.nlm.nih.gov/pubmed/34067006 http://dx.doi.org/10.3390/mi12050528 |