Study of the Absorption of Electromagnetic Radiation by 3D, Vacuum-Packaged, Nano-Machined CMOS Transistors for Uncooled IR Sensing

There is an ongoing effort to fabricate miniature, low-cost, and sensitive thermal sensors for domestic and industrial uses. This paper presents a miniature thermal sensor (dubbed TMOS) that is fabricated in advanced CMOS FABs, where the micromachined CMOS-SOI transistor, implemented with a 130-nm t...

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Detalles Bibliográficos
Autores principales: Cherniak, Gil, Avraham, Moshe, Bar-Lev, Sharon, Golan, Gady, Nemirovsky, Yael
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8157098/
https://www.ncbi.nlm.nih.gov/pubmed/34065752
http://dx.doi.org/10.3390/mi12050563

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8157098/
https://www.ncbi.nlm.nih.gov/pubmed/34065752
http://dx.doi.org/10.3390/mi12050563

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