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A Microtester for Measuring the Reliability of Microdevices in Controlled Environmental Conditions
A miniaturized reliability test system for microdevices with controlled environmental parameters is presented. The system is capable of measuring key electrical parameters of the microdevices while controlling the environmental conditions around the microdevices. The test system is compact and thus...
Autores principales: | , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2021
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8161092/ https://www.ncbi.nlm.nih.gov/pubmed/34065441 http://dx.doi.org/10.3390/mi12050585 |