Room Temperature Direct Electron Beam Lithography in a Condensed Copper Carboxylate

High-resolution metallic nanostructures can be fabricated with multistep processes, such as electron beam lithography or ice lithography. The gas-assisted direct-write technique known as focused electron beam induced deposition (FEBID) is more versatile than the other candidates. However, it suffers...

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Detalles Bibliográficos
Autores principales: Berger, Luisa, Jurczyk, Jakub, Madajska, Katarzyna, Szymańska, Iwona B., Hoffmann, Patrik, Utke, Ivo
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8161174/
https://www.ncbi.nlm.nih.gov/pubmed/34065297
http://dx.doi.org/10.3390/mi12050580

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8161174/
https://www.ncbi.nlm.nih.gov/pubmed/34065297
http://dx.doi.org/10.3390/mi12050580

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