A thin-film temperature sensor based on a flexible electrode and substrate

Accurate temperature measurements can efficiently solve numerous critical problems and provide key information. Herein, a flexible micro-three-dimensional sensor, with a combination of platinum and indium oxide to form thermocouples, is designed and fabricated by a microfabrication process to achiev...

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Detalles Bibliográficos
Autores principales: Liu, Zhaojun, Tian, Bian, Zhang, Bingfei, Liu, Jiangjiang, Zhang, Zhongkai, Wang, Song, Luo, Yunyun, Zhao, Libo, Shi, Peng, Lin, Qijing, Jiang, Zhuangde
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8166532/
https://www.ncbi.nlm.nih.gov/pubmed/34094587
http://dx.doi.org/10.1038/s41378-021-00271-0

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8166532/
https://www.ncbi.nlm.nih.gov/pubmed/34094587
http://dx.doi.org/10.1038/s41378-021-00271-0

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