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A thin-film temperature sensor based on a flexible electrode and substrate
Accurate temperature measurements can efficiently solve numerous critical problems and provide key information. Herein, a flexible micro-three-dimensional sensor, with a combination of platinum and indium oxide to form thermocouples, is designed and fabricated by a microfabrication process to achiev...
Autores principales: | Liu, Zhaojun, Tian, Bian, Zhang, Bingfei, Liu, Jiangjiang, Zhang, Zhongkai, Wang, Song, Luo, Yunyun, Zhao, Libo, Shi, Peng, Lin, Qijing, Jiang, Zhuangde |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Nature Publishing Group UK
2021
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8166532/ https://www.ncbi.nlm.nih.gov/pubmed/34094587 http://dx.doi.org/10.1038/s41378-021-00271-0 |
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