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High Yield Transfer of Clean Large-Area Epitaxial Oxide Thin Films

In this work, we have developed a new method for manipulating and transferring up to 5 mm × 10 mm epitaxial oxide thin films. The method involves fixing a PET frame onto a PMMA attachment film, enabling transfer of epitaxial films lifted-off by wet chemical etching of a Sr(3)Al(2)O(6) sacrificial la...

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Detalles Bibliográficos
Autores principales: Zhang, Bowen, Yun, Chao, MacManus-Driscoll, Judith L.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer Nature Singapore 2021
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8187697/
https://www.ncbi.nlm.nih.gov/pubmed/34138235
http://dx.doi.org/10.1007/s40820-020-00573-4