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High Yield Transfer of Clean Large-Area Epitaxial Oxide Thin Films
In this work, we have developed a new method for manipulating and transferring up to 5 mm × 10 mm epitaxial oxide thin films. The method involves fixing a PET frame onto a PMMA attachment film, enabling transfer of epitaxial films lifted-off by wet chemical etching of a Sr(3)Al(2)O(6) sacrificial la...
Autores principales: | Zhang, Bowen, Yun, Chao, MacManus-Driscoll, Judith L. |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Springer Nature Singapore
2021
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8187697/ https://www.ncbi.nlm.nih.gov/pubmed/34138235 http://dx.doi.org/10.1007/s40820-020-00573-4 |
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