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Analytic Design of Segmented Phase Grating for Optical Sensing in High-Precision Alignment System
Ultra-precision measurement systems are important for semiconductor manufacturing processes. In a phase grating sensing alignment (PGA) system, the measurement accuracy largely depends on the intensity of the diffraction signal and its signal-to-noise ratio (SNR), both of which are associated with t...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2021
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8198415/ https://www.ncbi.nlm.nih.gov/pubmed/34072752 http://dx.doi.org/10.3390/s21113805 |