Development and Proof of Concept of a Miniaturized MEMS Quantum Tunneling Accelerometer Based on PtC Tips by Focused Ion Beam 3D Nano-Patterning

Most accelerometers today are based on the capacitive principle. However, further miniaturization for micro integration of those sensors leads to a poorer signal-to-noise ratio due to a small total area of the capacitor plates. Thus, other transducer principles should be taken into account to develo...

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Detalles Bibliográficos
Autores principales: Haub, Michael, Bogner, Martin, Guenther, Thomas, Zimmermann, André, Sandmaier, Hermann
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8198744/
https://www.ncbi.nlm.nih.gov/pubmed/34070885
http://dx.doi.org/10.3390/s21113795

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8198744/
https://www.ncbi.nlm.nih.gov/pubmed/34070885
http://dx.doi.org/10.3390/s21113795

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