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Monitoring Carbon in Electron and Ion Beam Deposition within FIB-SEM

It is well known that carbon present in scanning electron microscopes (SEM), Focused ion beam (FIB) systems and FIB-SEMs, causes imaging artefacts and influences the quality of TEM lamellae or structures fabricated in FIB-SEMs. The severity of such effects depends not only on the quantity of carbon...

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Detalles Bibliográficos
Autores principales: Farr, Nicholas T. H., Hughes, Gareth M., Rodenburg, Cornelia
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8199708/
https://www.ncbi.nlm.nih.gov/pubmed/34199625
http://dx.doi.org/10.3390/ma14113034