Cargando…
Monitoring Carbon in Electron and Ion Beam Deposition within FIB-SEM
It is well known that carbon present in scanning electron microscopes (SEM), Focused ion beam (FIB) systems and FIB-SEMs, causes imaging artefacts and influences the quality of TEM lamellae or structures fabricated in FIB-SEMs. The severity of such effects depends not only on the quantity of carbon...
Autores principales: | , , |
---|---|
Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2021
|
Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8199708/ https://www.ncbi.nlm.nih.gov/pubmed/34199625 http://dx.doi.org/10.3390/ma14113034 |