Anomaly Detection Using Signal Segmentation and One-Class Classification in Diffusion Process of Semiconductor Manufacturing

This paper proposes a new diagnostic method for sensor signals collected during semiconductor manufacturing. These signals provide important information for predicting the quality and yield of the finished product. Much of the data gathered during this process is time series data for fault detection...

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Detalles Bibliográficos
Autores principales: Chang, Kyuchang, Yoo, Youngji, Baek, Jun-Geol
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8200057/
https://www.ncbi.nlm.nih.gov/pubmed/34199809
http://dx.doi.org/10.3390/s21113880

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8200057/
https://www.ncbi.nlm.nih.gov/pubmed/34199809
http://dx.doi.org/10.3390/s21113880

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