Thermal stability and diffusion characteristics of ultrathin amorphous carbon films grown on crystalline and nitrogenated silicon substrates by filtered cathodic vacuum arc deposition

Amorphous carbon (a-C) films are widely used as protective overcoats in many technology sectors, principally due to their excellent thermophysical properties and chemical inertness. The growth and thermal stability of sub-5-nm-thick a-C films synthesized by filtered cathodic vacuum arc on pure (crys...

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Detalles Bibliográficos
Autores principales: Wang, Shengxi, Roy, Anurag, Komvopoulos, Kyriakos
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8222292/
https://www.ncbi.nlm.nih.gov/pubmed/34162902
http://dx.doi.org/10.1038/s41598-021-91903-y

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8222292/
https://www.ncbi.nlm.nih.gov/pubmed/34162902
http://dx.doi.org/10.1038/s41598-021-91903-y

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