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High-Precision Machining Method of Weak-Stiffness Mirror Based on Fast Tool Servo Error Compensation Strategy

Weak-stiffness mirrors are widely used in various fields such as aerospace and optoelectronic information. However, it is difficult to achieve micron-level precision machining because weak-stiffness mirrors are hard to clamp and are prone to deformation. The machining errors of these mirrors are ran...

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Detalles Bibliográficos
Autores principales: Li, Zelong, Dai, Yifan, Guan, Chaoliang, Yong, Jiahao, Sun, Zizhou, Du, Chunyang
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8225102/
https://www.ncbi.nlm.nih.gov/pubmed/34073701
http://dx.doi.org/10.3390/mi12060607