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High-Precision Machining Method of Weak-Stiffness Mirror Based on Fast Tool Servo Error Compensation Strategy
Weak-stiffness mirrors are widely used in various fields such as aerospace and optoelectronic information. However, it is difficult to achieve micron-level precision machining because weak-stiffness mirrors are hard to clamp and are prone to deformation. The machining errors of these mirrors are ran...
| Autores principales: | , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2021
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8225102/ https://www.ncbi.nlm.nih.gov/pubmed/34073701 http://dx.doi.org/10.3390/mi12060607 |