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Tantalum-Doped TiO(2) Prepared by Atomic Layer Deposition and Its Application in Perovskite Solar Cells
Tantalum (Ta)-doped titanium oxide (TiO(2)) thin films are grown by plasma enhanced atomic layer deposition (PEALD), and used as both an electron transport layer and hole blocking compact layer of perovskite solar cells. The metal precursors of tantalum ethoxide and titanium isopropoxide are simulta...
Autores principales: | , , , , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2021
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8226548/ https://www.ncbi.nlm.nih.gov/pubmed/34200248 http://dx.doi.org/10.3390/nano11061504 |