Integrated Resonant Micro/Nano Gravimetric Sensors for Bio/Chemical Detection in Air and Liquid

Resonant micro/nanoelectromechanical systems (MEMS/NEMS) with on-chip integrated excitation and readout components, exhibit exquisite gravimetric sensitivities which have greatly advanced the bio/chemical sensor technologies in the past two decades. This paper reviews the development of integrated M...

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Detalles Bibliográficos
Autores principales: Jia, Hao, Xu, Pengcheng, Li, Xinxin
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Review
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8227694/
https://www.ncbi.nlm.nih.gov/pubmed/34073049
http://dx.doi.org/10.3390/mi12060645

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8227694/
https://www.ncbi.nlm.nih.gov/pubmed/34073049
http://dx.doi.org/10.3390/mi12060645

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