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Integrated Resonant Micro/Nano Gravimetric Sensors for Bio/Chemical Detection in Air and Liquid

Resonant micro/nanoelectromechanical systems (MEMS/NEMS) with on-chip integrated excitation and readout components, exhibit exquisite gravimetric sensitivities which have greatly advanced the bio/chemical sensor technologies in the past two decades. This paper reviews the development of integrated M...

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Detalles Bibliográficos
Autores principales:	Jia, Hao, Xu, Pengcheng, Li, Xinxin
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2021
Materias:	Review
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8227694/ https://www.ncbi.nlm.nih.gov/pubmed/34073049 http://dx.doi.org/10.3390/mi12060645

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