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An Electrostatic Self-Excited Resonator with Pre-Tension/Pre-Compression Constraint for Active Rotation Control

We report a novel electrostatic self-excited resonator driven by DC voltage that achieves variable velocity-position characteristics via applying the pre-tension/pre-compression constraint. The resonator consists of a simply supported micro-beam, two plate electrodes, and two adjustable constraint b...

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Detalles Bibliográficos
Autores principales: Yun, Ruide, Zhu, Yangsheng, Liu, Zhiwei, Huang, Jianmei, Yan, Xiaojun, Qi, Mingjing
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8227978/
https://www.ncbi.nlm.nih.gov/pubmed/34206079
http://dx.doi.org/10.3390/mi12060650