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Dry Film Resist Laminated Microfluidic System for Electrical Impedance Measurements
In micro-electrical-mechanical systems (MEMS), thick structures with high aspect ratios are often required. Dry film photoresist (DFR) in various thicknesses can be easily laminated and patterned using standard UV lithography. Here, we present a three-level DFR lamination process of SUEX for a micro...
Autores principales: | , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2021
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8228546/ https://www.ncbi.nlm.nih.gov/pubmed/34072385 http://dx.doi.org/10.3390/mi12060632 |
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author | Cao, Yuan Floehr, Julia Ingebrandt, Sven Schnakenberg, Uwe |
author_facet | Cao, Yuan Floehr, Julia Ingebrandt, Sven Schnakenberg, Uwe |
author_sort | Cao, Yuan |
collection | PubMed |
description | In micro-electrical-mechanical systems (MEMS), thick structures with high aspect ratios are often required. Dry film photoresist (DFR) in various thicknesses can be easily laminated and patterned using standard UV lithography. Here, we present a three-level DFR lamination process of SUEX for a microfluidic chip with embedded, vertically arranged microelectrodes for electrical impedance measurements. To trap and fix the object under test to the electrodes, an aperture is formed in the center of the ring-shaped electrodes in combination with a microfluidic suction channel underneath. In a proof-of-concept, the setup is characterized by electrical impedance measurements with polystyrene and ZrO(2) spheres. The electrical impedance is most sensitive at approximately 2 kHz, and its magnitudes reveal around 200% higher values when a sphere is trapped. The magnitude values depend on the sizes of the spheres. Electrical equivalent circuits are applied to simulate the experimental results with a close match. |
format | Online Article Text |
id | pubmed-8228546 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2021 |
publisher | MDPI |
record_format | MEDLINE/PubMed |
spelling | pubmed-82285462021-06-26 Dry Film Resist Laminated Microfluidic System for Electrical Impedance Measurements Cao, Yuan Floehr, Julia Ingebrandt, Sven Schnakenberg, Uwe Micromachines (Basel) Article In micro-electrical-mechanical systems (MEMS), thick structures with high aspect ratios are often required. Dry film photoresist (DFR) in various thicknesses can be easily laminated and patterned using standard UV lithography. Here, we present a three-level DFR lamination process of SUEX for a microfluidic chip with embedded, vertically arranged microelectrodes for electrical impedance measurements. To trap and fix the object under test to the electrodes, an aperture is formed in the center of the ring-shaped electrodes in combination with a microfluidic suction channel underneath. In a proof-of-concept, the setup is characterized by electrical impedance measurements with polystyrene and ZrO(2) spheres. The electrical impedance is most sensitive at approximately 2 kHz, and its magnitudes reveal around 200% higher values when a sphere is trapped. The magnitude values depend on the sizes of the spheres. Electrical equivalent circuits are applied to simulate the experimental results with a close match. MDPI 2021-05-29 /pmc/articles/PMC8228546/ /pubmed/34072385 http://dx.doi.org/10.3390/mi12060632 Text en © 2021 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/). |
spellingShingle | Article Cao, Yuan Floehr, Julia Ingebrandt, Sven Schnakenberg, Uwe Dry Film Resist Laminated Microfluidic System for Electrical Impedance Measurements |
title | Dry Film Resist Laminated Microfluidic System for Electrical Impedance Measurements |
title_full | Dry Film Resist Laminated Microfluidic System for Electrical Impedance Measurements |
title_fullStr | Dry Film Resist Laminated Microfluidic System for Electrical Impedance Measurements |
title_full_unstemmed | Dry Film Resist Laminated Microfluidic System for Electrical Impedance Measurements |
title_short | Dry Film Resist Laminated Microfluidic System for Electrical Impedance Measurements |
title_sort | dry film resist laminated microfluidic system for electrical impedance measurements |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8228546/ https://www.ncbi.nlm.nih.gov/pubmed/34072385 http://dx.doi.org/10.3390/mi12060632 |
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