High-Consistency Optical Fiber Fabry–Perot Pressure Sensor Based on Silicon MEMS Technology for High Temperature Environment

This paper proposes a high-temperature optical fiber Fabry–Perot pressure sensor based on the micro-electro-mechanical system (MEMS). The sensing structure of the sensor is composed of Pyrex glass wafer and silicon wafer manufactured by mass micromachining through anodic bonding process. The separat...

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Detalles Bibliográficos
Autores principales: Feng, Fei, Jia, Pinggang, Qian, Jiang, Hu, Zhengpeng, An, Guowen, Qin, Li
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8228703/
https://www.ncbi.nlm.nih.gov/pubmed/34071225
http://dx.doi.org/10.3390/mi12060623

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8228703/
https://www.ncbi.nlm.nih.gov/pubmed/34071225
http://dx.doi.org/10.3390/mi12060623

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