Macro Modeling of V-Shaped Electro-Thermal MEMS Actuator with Human Error Factor

The V-shaped electro-thermal MEMS actuator model, with the human error factor taken into account, is presented in this paper through the cascading ANSYS simulation model and the Fuzzy mathematics calculation model. The Fuzzy mathematics calculation model introduces the human error factor into the ME...

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Detalles Bibliográficos
Autores principales: Zhang, Dongpeng, Cai, Anjiang, Zhao, Yulong, Hu, Tengjiang
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8229871/
https://www.ncbi.nlm.nih.gov/pubmed/34072272
http://dx.doi.org/10.3390/mi12060622

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8229871/
https://www.ncbi.nlm.nih.gov/pubmed/34072272
http://dx.doi.org/10.3390/mi12060622

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