Macro Modeling of V-Shaped Electro-Thermal MEMS Actuator with Human Error Factor

The V-shaped electro-thermal MEMS actuator model, with the human error factor taken into account, is presented in this paper through the cascading ANSYS simulation model and the Fuzzy mathematics calculation model. The Fuzzy mathematics calculation model introduces the human error factor into the ME...

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Detalles Bibliográficos
Autores principales: Zhang, Dongpeng, Cai, Anjiang, Zhao, Yulong, Hu, Tengjiang
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8229871/
https://www.ncbi.nlm.nih.gov/pubmed/34072272
http://dx.doi.org/10.3390/mi12060622
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author Zhang, Dongpeng
Cai, Anjiang
Zhao, Yulong
Hu, Tengjiang
author_facet Zhang, Dongpeng
Cai, Anjiang
Zhao, Yulong
Hu, Tengjiang
author_sort Zhang, Dongpeng
collection PubMed
description The V-shaped electro-thermal MEMS actuator model, with the human error factor taken into account, is presented in this paper through the cascading ANSYS simulation model and the Fuzzy mathematics calculation model. The Fuzzy mathematics calculation model introduces the human error factor into the MEMS actuator model by using the BP neural network, which effectively reduces the error between ANSYS simulation results and experimental results to less than 1%. Meanwhile, the V-shaped electro-thermal MEMS actuator model, with the human error factor included, will become more accurate as the database of the V-shaped electro-thermal actuator model grows.
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spelling pubmed-82298712021-06-26 Macro Modeling of V-Shaped Electro-Thermal MEMS Actuator with Human Error Factor Zhang, Dongpeng Cai, Anjiang Zhao, Yulong Hu, Tengjiang Micromachines (Basel) Article The V-shaped electro-thermal MEMS actuator model, with the human error factor taken into account, is presented in this paper through the cascading ANSYS simulation model and the Fuzzy mathematics calculation model. The Fuzzy mathematics calculation model introduces the human error factor into the MEMS actuator model by using the BP neural network, which effectively reduces the error between ANSYS simulation results and experimental results to less than 1%. Meanwhile, the V-shaped electro-thermal MEMS actuator model, with the human error factor included, will become more accurate as the database of the V-shaped electro-thermal actuator model grows. MDPI 2021-05-27 /pmc/articles/PMC8229871/ /pubmed/34072272 http://dx.doi.org/10.3390/mi12060622 Text en © 2021 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Zhang, Dongpeng
Cai, Anjiang
Zhao, Yulong
Hu, Tengjiang
Macro Modeling of V-Shaped Electro-Thermal MEMS Actuator with Human Error Factor
title Macro Modeling of V-Shaped Electro-Thermal MEMS Actuator with Human Error Factor
title_full Macro Modeling of V-Shaped Electro-Thermal MEMS Actuator with Human Error Factor
title_fullStr Macro Modeling of V-Shaped Electro-Thermal MEMS Actuator with Human Error Factor
title_full_unstemmed Macro Modeling of V-Shaped Electro-Thermal MEMS Actuator with Human Error Factor
title_short Macro Modeling of V-Shaped Electro-Thermal MEMS Actuator with Human Error Factor
title_sort macro modeling of v-shaped electro-thermal mems actuator with human error factor
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8229871/
https://www.ncbi.nlm.nih.gov/pubmed/34072272
http://dx.doi.org/10.3390/mi12060622
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AT zhaoyulong macromodelingofvshapedelectrothermalmemsactuatorwithhumanerrorfactor
AT hutengjiang macromodelingofvshapedelectrothermalmemsactuatorwithhumanerrorfactor

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